HU Lanyi;YIN Shenxin;XU Caibin;ZHAO Youxuan;DENG Mingxi;College of Aerospace Engineering,Chongqing University;In recent years,advances in semiconductor silicon wafer manufacturing have increased the demand for accurate detection of subsurface defects.When inspecting microcracks far smaller than the wavelength,nonlinear Lamb waves offer distinct advantages such as high efficiency,high sensitivity,and nondestructive evaluation.However,their application in silicon wafer inspection remains limited,partly due to the unclear relationship between nonlinear Lamb wave signal characteristics and subsurface microcrack features.In this work,finite element models of Lamb wave propagation in silicon wafers with subsurface microcracks are established.The Lamb wave mode pair S_0-s_0,satisfying phase-velocity matching,is employed to investigate how the acoustic nonlinearity parameter(ANP)of the second-harmonic correlates with propagation distance and microcrack characteristics.Simulation results indicate that the ANP increases with propagation distance,and the presence of subsurface microcracks significantly amplifies its amplitude.Moreover,the relative ANP increases with the number,length,density of subsurface microcracks,and subsurface damage layer thickness.Additionally,for a given density,the length of subsurface microcracks has a more significant influence on the relative ANP than their number.This study illustrates the potential of nonlinear Lamb waves for detecting subsurface microcracks in silicon wafers and provides simulation-based validation for its feasibility.
2026 02 v.54;No.224 [Abstract][OnlineView][Download 527K]